A model cylindrical magnetron Vlasov distribution function

Unbalanced Cylindrical Magnetron for Accelerating Cavities Coating

The magnetron instability in a pulsar’s cylindrical electrosphere

Context. The physics of the pulsar magnetosphere near the neutron star surface remains poorly constrained by observations. Although about 2000 pulsars have been discovered to date, little is known about their emission mechanism, from radio to high-energy X-ray and gamma-rays. Large vacuum gaps probably exist in the magnetosphere, and a non-neutral plasma partially fills the neutron star surroun...

2D PIC Simulation of the DC Discharge in Cylindrical Magnetron

PIC method of plasma simulation is widely used in plasma physics research because of its ability to solve wide range of problems in kinetic approach. Regarding to description of PIC method we refer to [Birdsall et al., 1995]. This work is focused on PIC simulations of dc discharge in cylindrical magnetron device. Magnetrons are used in industry e.g. for thin film layer coating and etching. Many...

PFC / JA - 93 - 16 Electron Distribution Function Measurements on a Magnetron Injection Gun Beam

The parallel electron distribution function has been measured on an electron beam from a magnetron injection gun (MIG) using an E 11 B energy analyzer. The magnetic field, beam voltage and beam current were scaled down from normal operating parameters. The perpendicular velocity spread, inferred under the assumption that the electrons are mono-energetic, is relatively constant for electron velo...

Film thickness distribution in magnetron sputtering

Of crucial importance to the thin film process engineer is an understanding of the parameters which affect the film thickness distributions which may be obtained from magnetron sources. This paper describes how variations in source design, target erosion and source-to-substrate distance affect observed uniformities from a magnetron source. A simple method of simulating magnetron sources using t...